Nature research paper: Extending the spectrum of fully integrated photonics to submicrometre wavelengths
) show a single SiN waveguide, a coupler, a III–V waveguide with III–V/SiN coupler on one side and an array of lasers connecting with an array of photodiodes via SiN waveguides, respectively.
Fig. 2: Silicon nitride heterogeneous photonics platform with a full set of passive and active building block components supporting submicrometre wavelengths., Simplified wafer-scale process flow.
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